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독성 가스 데이터 Ordering Information
표준명명 화학식 인체 허용농도 비중(공기= 1)
Acetic Acid CH3COOH 10ppm 2.07
Ammonia NH3 25ppm 0.6
Arsine AsH3 0.1ppm 2.7
Boron Trichloride BCl3 5ppm 4.07
Boron Trifluoride BF3 3ppm 2.38
Bromine Br2 0.1ppm 5.5
Carbon Monoxide CO 25ppm 0.968
Chlorine Cl2 1ppm 2.49
Diborane B2H6 0.1ppm 0.96
Dichlorosilane (DCS) H2Cl2Si 5ppm 3.51
Disilane Si2H6 5ppm  
Ethylene Oxide C2H4O 1ppm 1.52
Fluorine F2 1ppm 1.312
Germane GeH4 0.2ppm 2.66
Hydrazine N2H4 0.1ppm 1.011
Hydrogen H2   0.07
Hydrogen Bromide HBr 3ppm 2.812
Hydrogen Chloride HCL 5ppm 1.27
Hydrogen Cyanide HCN 10ppm 0.941
Hydrogen Fluoride HF 3ppm 0.7
Hydrogen Selenide H2Se 0.05ppm 2.81
Hydrogen Sulfide H2S 10ppm 1.19
Nitric Acid HNO3 2ppm 3.2
Nitrogen Monoxide NO 25ppm 1.53
Nitrogen Dioxide NO2 3ppm 1.58
Nitrogen Tetraoxide N2O4 3ppm  
Oxygen O2   1.11
Ozone O3 0.1ppm 1.65
Phosphine PH3 0.3ppm 1.18
Phosphorus Oxychloride POCI3 5ppm 5.3
Phosphorus Pentafluoride PF5 3ppm 4.46
Phosphorus Trichloride PCI3 0.2ppm 4.77
Silane SiH4 5ppm 1.11
Silicon Tetrachloride SiCl4 5ppm 5.9
Silicon Tetrafluoride SiF4 3ppm 3.61
Sulfur Dioxide SO2 2ppm 2.26
Sulfur Tetrafluoride SF4 0.1ppm  
Tantalum Fluoride TaF5 3ppm  
Tin Tetrachloride SnCL4 5ppm  
Titanium Fluoride TiF4 3ppm  
Titanium Tetrachloride TiCL4 5ppm 6.6
Trichlorosilane SiHCL3 5ppm 4.7
Tungsten Hexafluoride WF6 3ppm 10.6
Trimethoxy Boron (TMB) B(OCH3)3 200ppm  
Trimethyl Phosphite (TMP) P(OCH3)3 2ppm  
Tetraethoxy Silane (TEOS) Si(OC2H5)4 10ppm 0.936
Difluoro Methane CH2F2 1000ppm 1.8
Sulfur Hexafluoride SF6 1000ppm 5-6.602
Nitrogen Trifuoride NF3 10ppm 2.46
Nitrous Oxide N2O 50ppm 1.53
Carbon Dioxide CO2 5000ppm 1.5
Phosgen COCL2 0.1ppm 3.4
Methyl Ethyl Ketone CH3COCH2CH3 200ppm 2.5
Tetrafluoromethane CF4   3.05
Dichlorodifluoromethane CCL2F2 1000ppm 4.2
Octafluorocyclobutane C4F8   7.33
Fluoroform CHF3   2.417